Method of evaluation applicable to the corrosion resistance of metallization of integrated
microcircuits used in construction as part of products of industrial electronics and computer
V.I. Kolomiets, Candidate of Technical Sciences
Moscow State University of Civil Engineering (National Research University)
Abstract. The influence of complex influence of climatic factors (temperature, humidity) and electric mode (supply voltage) on the corrosion resistance of metallization of integrated circuits has been considered. The regression dependence of the average time of troublefree operation t on the mentioned factors has been established in the form of a modified Arrhenius equation that is suitable for selecting accelerated test modes. A technique for evaluating the corrosion resistance of aluminum metallization of decapsulated CMOS integrated circuits has been proposed.
Key words: integrated microcircuit, electrolytic corrosion, time to failures, extreme tests, multifactorial tests, experiment planning, mathematical model.